Ultra-Wide BandGap Semiconductors (UWBGS)

Funding Agency:
Defense Advanced Research Projects Agency

The Microsystems Technology Office at DARPA seeks innovative proposals to develop foundational ultra-wide bandgap (UWBG) materials (substrate, device layers, and junctions) and low resistance electrical contacts necessary for realization of devices that enable UWBG applications. In particular, DARPA seeks proposals in the following areas: 1) low defect density, large area (100 mm diameter), epi-ready, UWBG substrates and 2) uniform, low defect density UWBG device layers with high doping efficiency, abrupt homo- and/or hetero-junctions with low junction defect density (1012/cm2 ), and ultra-low resistance electrical contacts (2 x 10-6 ohm-cm2 ). It is anticipated that the technical approaches to meet these goals will be different, and therefore, separate proposals are required for each Technical Area. Proposed research should investigate innovative approaches that enable revolutionary advances in materials, devices, circuits, and systems. Specifically excluded is research that primarily results in evolutionary improvements to the existing state of practice.


o Abstract Due Date: November 1, 2023

o Proposal Due Date: December 15, 2023

Agency Website

Areas of Interest

Technical Area 1: UWBG Substrates

TA1 addresses technical challenge 1 and is focused on improving UWBG material quality (i.e., reducing defect density and surface roughness) while increasing substrate size (diameter). TA1 metrics are specified in Table 1. Note that Table 1 includes proposer-defined metrics for starting (state-of-the-art) substrate size, defect density, thermal conductivity, and surface roughness, all of which are based on the proposed UWBG material.

Technical Area 2: UWBG Device Layers and Electrical Contacts

In TA2 performers must address technical challenges 2A, 2B, and 3. TA2 metrics are specified in Table 2, and proposers must show how all metrics will be met simultaneously. Note that Table 2 includes proposer-defined metrics for doping efficiency that are based on the proposed UWBG material system.

Eligibility Requirements

All responsible sources capable of satisfying the Government's needs may submit a proposal that shall be considered by DARPA. Historically Black Colleges and Universities, Small Businesses, Small Disadvantaged Businesses and Minority Institutions are encouraged to submit proposals and join others in submitting proposals; however, no portion of this announcement will be set aside for these organizations’ participation due to the impracticality of reserving discrete or severable areas of this research for exclusive competition among these entities.

Funding Type





Engineering and Physical Sciences

External Deadline

December 15, 2023